Multifunctional vacuum coating machine is a hybrid equipment of magnetron sputtering, multi arc ion and evaporation coating. It is equipped with cylindrical target or planar magnetron target on the basis of multi arc ion coating machine. The equipment has the characteristics of high ionization rate and high stacking speed of ion plating. It also has the advantages of low temperature and stability of magnetron sputtering. It is suitable for plating various composite films.
Multi function vacuum coating machine: magnetron, medium frequency, multi arc ion coating
① Transpiration and magnetron sputtering mixing equipment: multifunctional, suitable for mass production, strong adaptability.
② Mixed application of magnetron sputtering and multi arc ion plating: multi arc can improve the quality of artillery cleaning, and add the adhesion between film and substrate. Working together with magnetron sputtering, composite films can be prepared (high energy ion source cleaning and activation, fast film forming speed).
③ Mixed application of multiple medium frequency magnetron sputtering targets and column arc ion plating: medium frequency targets are more stable (such as Al), with high ionization rate, fast stacking rate and uniform film formation. If reactive sputtering, such as plating SiO2, TiO2, multi-layer coating with different raw materials.
④ Mixed application of RF, DC, intermediate frequency and column arc: RF can directly coat insulation protective film, such as SiO2 / Ag / SiO2
⑤ Mixed application of cylindrical arc, medium frequency arc and multi arc: cylindrical arc ensures high ionization rate, reduces the accumulation of large particles, and has good adhesion and surface finish. The multi-function vacuum coating machine is suitable for middle and high-level products, such as watch strap, watch case, eyeglass frame, mobile phone case, golf tools, sanitary ware, jewelry, etc.