1. The structural form of vacuum pipe and static sealing parts (flange, sealing ring, etc.) in the equipment shall comply with the provisions of GB / t6070.
2. The vacuum gauge shall be installed on the low vacuum and high vacuum pipes and the vacuum coating chamber to measure the vacuum degree of each part. When it is found that the electric field interferes with the measurement, the electric field shielding device should be installed at the measuring port.
3. If the main pump used by the equipment is a diffusion pump, an oil vapor trap should be installed on the air inlet side of the pump.
4. The coating room of the equipment shall be equipped with observation window and baffle device. The observation window should be able to observe the working condition of sedimentary source and other key parts.
5. The design of ion plating deposition source should improve the ionization rate in the process of coating as much as possible, improve the utilization rate of coating materials, reasonably match the power of deposition source, and reasonably arrange the position of deposition source in the vacuum chamber.
6. The heating device should be arranged reasonably, and the general structure layout of the heater should make the temperature rise of the plated workpiece uniform.
7. The workpiece holder shall be insulated from the vacuum chamber body, and the design of the workpiece holder shall make the film of the workpiece uniform.
8. Generally, the ion plating equipment should be equipped with negative bias voltage and ion bombardment power supply. The ion bombardment power supply should be equipped with abnormal discharge suppression device to maintain stable operation.
9. The insulation resistance value of each part of the vacuum chamber connected with different potentials:
(1) Ambient temperature: 10-30oc
(2) Relative humidity: not more than 75%
(3) Inlet temperature of cooling water: not higher than 25oC
(4) Cooling water quality: urban tap water or equivalent quality water
(5) Power supply: 380V three-phase 50 Hz or 220 V single-phase 50 Hz (depending on the needs of the electrical appliances used); Voltage fluctuation range: 342-399v or 198-231v; Frequency fluctuation range: 49-51hz.
(6) The pressure, temperature and consumption of compressed air, liquid nitrogen, cold water and hot water required by the equipment shall be specified in the product manual.
(7) The surrounding environment of the equipment shall be clean and tidy, and the air shall be clean. There shall be no dust or gas that may cause corrosion on the surface of electrical appliances and other metal parts or cause electric conduction between metals.