Vacuum coating machine mainly refers to a kind of coating equipment which needs to be carried out under high vacuum degree, including vacuum evaporation coating machine, vacuum multi arc ion plating machine, vacuum medium frequency magnetron sputtering coating machine, multi-functional if magnetron sputtering multi arc composite ion plating machine, vacuum optical (electron beam evaporation) coating machine and other vacuum coating equipment. So what should we pay attention to when using vacuum electroplating machine? How to maintain and maintain? Let's have a look!
1、 Precautions for safe operation
1. Operators of vacuum electroplating machine shall wear clean and tidy, cuffs shall be fastened (sleeve sleeve shall be worn), and the hem of the coat shall not be opened, slippers and high heels shall not be worn;
2. Check whether the control switches of the circuit are normally open and closed, and the voltage indication is 380 ± 20V；
3. Check whether the connection of each screw is firm, whether the connecting wire of the electric control cabinet and main engine is loose or not, and whether the grounding is good; All electrical switches are at zero or "off" position;
4. Check whether the plug pin of stainless steel baffle plate in the coating machine is firm, and whether the corner is bent and warped;
5. Check whether the water pressure and air pressure are normal; Whether there is leakage of water, oil and gas;
6. When the equipment stops water in the middle, the diffusion pump, crude pump and roots pump shall be shut down immediately to keep the pump running;
7. When the equipment stops gas in the middle, the diffusion pump, crude pump and roots pump shall be shut down immediately to keep the pump running;
8. When the equipment is cut off in the middle of the way, the main power supply shall be turned off immediately, and then the diffusion pump, crude pump and maintenance pump shall be shut down;
9. When the diffusion pump is heated, avoid the person contacting the diffusion pump heater to avoid scalding;
10. When the workpiece is rotating, it is forbidden to operate all the work; The upper and lower drum operation can only be carried out after the workpiece is completely stopped rotating;
11. After electroplating, when opening the door is needed, the operator shall hold the handle, slowly open the door, and insert the pin into the fixing hole;
12. Operators of vacuum electroplating machine must strictly follow the operation instruction and safety operation procedures of equipment, pay attention to the safety of equipment itself and equipment operation, especially pay attention to the inspection and use of safety devices.
2、 Maintenance and maintenance methods
1. Clean the workshop once every 200 coating procedures have been completed.
Methods: the vacuum indoor wall was repeatedly scrubbed with NaOH saturated solution (attention should be paid to that the human skin should not contact the caustic solution directly to avoid burning). The purpose was to make the aluminum (AL) coated react with NaOH, and the film fell off after the reaction and released hydrogen. Clean the vacuum chamber with clean water and clean the dirt in the fine extraction valve with cloth and gasoline.
2. When the crude pump (slide valve pump and rotary vane pump) works for one month (half in rainy season), new oil shall be replaced.
Methods: screw open the oil bolt, release the old oil, and then start the pump for several seconds to make the old oil in the pump completely discharged. Screw back the oil bolt and add new oil to the quantity (observe by oil mirror). For more than half a year of continuous use, the oil cover shall be opened when changing oil and the dirt inside the tank shall be cleaned with cloth.
3. The diffusion pump is used for more than 6 months continuously, the pumping speed is obviously slow, or the operation is improper. Fill the air, remove the connecting pipe, remove the electric furnace plate, screw out the primary nozzle, first clean the pump cavity and pump liner with gasoline, then wash it with washing powder and water, then clean it with clean water. After the water evaporates, the pump liner is installed and the new diffusion pump oil is added, And install the body, connect the water pipe, install the electric furnace plate, and then restart the machine. Before restart, pay attention to leak detection.
Methods: start the maintenance pump, close the gate, and after a few minutes, observe whether the vacuum degree of the diffusion pump reaches 6x10 PA, otherwise, leakage detection shall be carried out. Check whether the joint is equipped with sealing rubber ring or press down the sealing ring. The heating can be carried out after the hidden gas leakage is eliminated, otherwise the oil of the diffusion pump will burn the ring and cannot enter the working state.