How to maintain the diffusion pump of vacuum coating machine? Diffusion pump is the main part of vacuum coating machine. In order to keep the machine in good condition, it is very important to maintain the diffusion pump of vacuum coating machine. Today I would like to share with you the maintenance knowledge of vacuum coating machine diffusion pump. Let's learn about it!

1. During the working process of the diffusion pump, the cooling water must be unblocked. After the heating is stopped, the cooling water can be closed only after the working liquid of the pump has been completely cooled.
2. When the diffusion pump stops working, the vacuum should be kept in the pump to avoid the deterioration of pump oil.
3. The gas to be pumped shall be dry, corrosion-free and dust-free.
4. If the diffusion pump is not used for the time being, it should be kept in a vacuum state during storage, so as to avoid pump oil pollution and corrosion of various parts, and blow out the residual water in the cooling water jacket. Keep the room temperature of the site between 10-40 ℃.
5. Diffusion pump performance will gradually deteriorate after long-term work, should be checked regularly. For example: whether the pump oil is reduced or oxidized, add oil or replace it according to the corresponding requirements; The parts and pump cavity are first cleaned with aviation gasoline, then scrubbed with acetone, dried at 80-100 ℃ or dried with electric hair dryer. After the treatment, the assembly shall be carried out in order to keep the pump core perpendicular to the pump bottom and concentric with the pump cavity, and the gap between nozzles at all levels shall be adjusted according to the original requirements.
6. After the water is evaporated and dried, install the pump core, add the new diffusion pump oil, and install it back into the machine body, connect the water pipe, install the electric furnace tray, and then restart the machine.
7. Pay attention to leak detection before restart. The method is: start the maintenance pump, close the vacuum chamber door, after a few minutes, observe whether the vacuum degree is 6 * 10 0 PA, otherwise it is necessary to carry out leakage detection, check whether the sealing rubber ring is missing at the connection, or the sealing ring is crushed. Heating can only be carried out after the hidden danger of air leakage is eliminated, otherwise the diffusion pump oil will burn out and cannot enter the working state.