Equipment specification
According to the customer's production, we can customize the single cavity winding plating machine or the multi cavity continuous production line
Actual cases
Lzd600-300 (single machine mode only)
Equipment configuration and parameters

1、 Vacuum chamber
1. Inner diameter of vacuum chamber Φ 1000, inner height H800, main material SUS304 stainless steel welding, top and bottom plate
δ 25 mm, inner panel δ 10mm, water jacket plate δ The vacuum chamber is cooled by water jacket;
2. The front door is opened with a large cutting door, the right door is opened, and the front door is set with a rectangular observation window of 170mm × 82mm, with baffle;
3. Heaters are installed on both sides of the inner turret. It is installed in the middle and around the vacuum chamber;
4. The vacuum chamber is cooled by welding water jacket, bottom in and top out, and the vacuum chamber is cooled by direct cooling water circulation;
5. The lower rotating frame is adopted, and the transmission mechanism and bias input terminal are introduced at the bottom;
7. Set the vacuum gauge reserved port kf16 behind the top plate × 2 for installation of vacuum gauge;
8. The thermocouple is installed on the top plate of the vacuum chamber, and the charging valve is installed above the high valve;.
2、 Air extraction unit
1. Crude pump 2x-70 rotary vane pump, 2 sets
2. Booster pump rto.600s roots pump, 1 set
(the outlet of roots pump is connected with the roughing pump by bottom flange)
3. Molecular pump jtfb-3600, 2 sets
4. Maintenance pump 2x-70 rotary vane pump, 1 set
5. The rough extraction pipeline and the maintenance pipeline are connected by a bypass valve
3、 Configuration of steam source
1、 Φ Two groups of 100 directional cylindrical arc targets (4 sets / group + 4 sets / group, 8 sets in total)
2. Pneumatic arc striking mechanism, auxiliary anode automatic compensation voltage circuit, automatic protection over-current system
3. The initial distance between the target surface and the workpiece surface of the arc target is 250mm, and the standard titanium arc stabilization is ≤ 60A,
4、 Arc power supply
1. Two sets of high frequency inverter DC arc power supply are matched with evaporation source, 8 sets in total.
2. Arc striking voltage 60V ~ 80V (can be adjusted according to demand)
3. Working voltage 20V ～ 25V
4. Working current 50A ～ 200A (adjustable)
5. Protection mode: automatic arcing, overload protection restart
5、 Two stage pulse bias power supply
1. Two stage pulse power supply: 50KHz
2. Power: 30KW
3. The working voltage can be adjusted to three levels, and a level is 10V ~ 200V; B gear 100V ～ 800V
4. Pulse range duty cycle 10% ～ 90%
6、 Vacuum measurement
1. One set of three in one composite vacuum gauge (composite pressure controller).
2. Thermocouples: measuring atmosphere ~ 1.0 × 10-1pa section vacuum. It is matched with the pumping system as the control data signal of the pumping process.
3. Ion vacuum gauge: measuring 6.6 × 100Pa～1.0 × The vacuum of 10-4Pa section is used as the control data signal of the pumping process in combination with the pumping system.
4. A closed-loop automatic control system for coating process is composed of a composite pressure controller and an imported high-sensitivity piezoelectric ceramic valve.
7、 Full automatic control
1. The whole machine adopts full-automatic control and preset process menu, which can complete the continuous process of one button air extraction, coating and deflation
technological process.
2. Controlled by Mitsubishi PLC, 14 inch Kunlun Tongtai touch screen.
3. The components installed in the control cabinet are basically of international brands such as Hequan, Omron and Schneider.
4. Adopt full automation, process automation and manual operation control multi-mode process.
8、 Boost rate detection
1. Pressure rise rate detection: the furnace body is pumped to the limit vacuum, and the no-load pressure rise rate is 0.67pa/h < according to the national standard > 0.05pa/h
2. Cold no-load 24 hours vacuum ≤ 6 × 10-4Pa。
9、 Venue
In line installation × wide × 4m high × 3.8m × 4m (excluding the reserved space and peripheral configuration, the control system and the host are separately assembled when the standard installation mode is selected.)