The concept of film uniformity of vacuum coater? Vacuum coater mainly refers to a kind of coating that needs to be carried out under high vacuum, including many kinds, including vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, ion beam sputtering and so on. The main idea is divided into evaporation and sputtering.

1. The uniformity of thickness can also be understood as roughness. In terms of the scale of optical film (that is, 1 / 10 wavelength as a unit, about 100a), the uniformity of vacuum coating is quite good, and the roughness can be easily controlled within 1 / 10 of the wavelength of visible light, that is to say, there is no obstacle for the optical properties of the film. However, if it refers to the uniformity on the atomic layer scale, that is to say, to achieve the surface flatness of 10A or even 1a, the specific control factors will be explained in detail according to different coatings.
2. Uniformity of chemical composition: that is to say, in the film, the atomic composition of the compound is easy to produce non-uniformity due to too small scale. If the coating process is not scientific, the composition of the actual surface is not sitio3, but may be other proportions, and the coating is not the chemical composition of the desired film, This is also the technical content of vacuum coating.
3. Uniformity of lattice order: This determines that the film is single crystal, polycrystalline and amorphous, which is a hot issue in vacuum coating technology.